Micro-ElectroMechanical Systems (MEMS)

Micro-ElectroMechanical Systems (MEMS) are an increasingly pervasive technology in our daily lives. Smartphones and tablets feature an array of MEMS, from motion sensors and gyroscopes, to microphones and speakers; while automotive MEMS are present from airbag systems and brakes, to emissions control and navigation. Still more opportunities exist for MEMS in other applications, including biomedical sensors and drug delivery systems.

According to Yole Développement, the MEMS market is positioned to grow 16% per year (CAGR) through 2014, rising to a $14 billion market.

SEMI brings the industry together at SEMICON expositions around the world.  Popular MEMS Forums are held at the following MEMS events:

Industry Standards

SEMI Standards MEMS/ NEMS Technical Committee

Industry Backgrounder

 MEMS Market Data by Yole Développement


Published Standards:

SEMI MS1-0812

Guide to Specifying Wafer-Wafer Bonding Alignment Targets

SEMI MS2-1113

Test Method for Step Height Measurements of Thin Films

SEMI MS3-0307

Terminology for MEMS Technology

SEMI MS4-1113

Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance

SEMI MS5-0813

Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures

SEMI MS6-0308

Guide for Design and Materials for Interfacing Microfluidic Systems

SEMI MS7-0708

Specification for Microfluidic Interfaces to Electronic Device Packages

SEMI MS8-0309

Guide to Evaluating Hermeticity of MEMS Packages

SEMI MS9-0611

Specification for High Density Permanent Connections Between Microfluidic Devices

SEMI MS10-0912

Test Method to Measure Fluid Permeation Through MEMS Packaging Materials


MEMS / NEMS Standards Task Forces

  • Microfluidics TF
  • Wafer Bond TF
  • International Terminology TF
  • Packaging TF
  • Materials Characterization TF
  • Reliability TF

Current MEMS / NEMS Standards Activites

  • Documents in Development
    • New Standard: Specification for Microfluidic Port and Pitch Dimensions
    • New Standard: Test Method for Autofluorescence of Materials
    • New Standard: Test Method for Electro-osmotic Mobility in Microfluidic Systems
    • Revision to SEMI MS7, Specification for Microfluidic Interfaces to Electronic Device Packages
    • Revision to MS03-07, Terminology for MEMS Technology with title change to: Terminology for MEMS / NEMS Technology
  • Upcoming Standardization Areas
    • 3DS-IC related activities from SEMATECH
    • Silicon on Insulators (SOI) for MEMS Applications
    • Outgassing for MEMS packaging
For more information about SEMI Standards, please visit .
Emerging Markets News
  • MEMS: Making Micro Machines - New Training Movie Now Available!

    A film by Silicon Run Productions, funded by the NSF, MIG, SEMI and others.Purchase Movie

     For more information, contact: